Maipt Machinery Reaches In-Depth Cooperation with Semiconductor Enterprise, Temperature Control Technology Supporting Industry Development

Recently, Maipt Machinery Company has established in-depth cooperation with a renowned domestic semiconductor enterprise, supplying a series of high-precision temperature control equipment including: high-low temperature integrated machine (-110°C to 300°C) and TCU (Temperature Control Unit) modules (-20°C to 300°C) featuring multi-medium heat exchange capabilities.

In semiconductor manufacturing, precise temperature control is critical for both product quality and production efficiency. Maipt Machinery company's high-low temperature integrated machine utilizes a fully enclosed pipeline design with high-efficiency plate heat exchangers. This solution not only reduces heat-transfer fluid consumption but also enhances thermal efficiency, enabling rapid temperature ramping. Operating across an extensive range of -110°C to 300°C, the system delivers pinpoint temperature regulation that complies with rigorous process requirements throughout semiconductor fabrication stages. Mean while, equipped with an intelligent PID temperature control system, the equipment achieves ±0.1°C stability—ensuring consistent product quality while minimizing thermal deviation during critical processes such as etching and deposition.

The TCU temperature control unit (-20°C to 300°C) with multi-medium heat exchange demonstrates unique advantages. Utilizing thermal oil or glycol-water solution as the heat transfer fluid, it drives forced circulation via a centrifugal pump to deliver precise temperature to target equipment before returning to the control unit. This closed-loop operation enables continuous heat transfer, fulfilling process requirements for refrigeration, heating, and constant temperature. Equipped with an advanced intelligent protection system, the equipment effectively prevents operational failures while ensuring production safety. Furthermore, its low-consumption energy-saving design significantly reduces operational costs for enterprises.

Under this collaboration, Maipt Machinery Company delivered an application-engineered temperature control solution tailored to the semiconductor manufacturer's specific process requirements. Through joint technical coordination between both engineering teams, comprehensive equipment commissioning and validation were completed alongside structured on-site training—ensuring seamless operational integration and sustained thermal performance stability.