Widely applied in semiconductor manufacturing processes for reaction chamber temperature control, heat sink plate thermal regulation, and thermal management scenarios requiring non-flammable heat transfer fluids.
Medium Circulation System Pressure Holding Test at 7 bar
High-quality magnetic drive pump with mechanical seal-free design.
Optimized temperature sampling and response dynamics with dedicated control algorithm enabling rapid stabilization to target setpoint.
Enhanced circulation pump design with high-head performance to meet system requirements.
Continuous high-temperature cooling technology with thermostatic control capability ensures stable operation under thermal load applied to heat sink plates.
Enhanced joint engineering and multi-stage sealing architecture targeting fluorinated liquid volatility characteristics to ensure media service life compliance with chemical stability thresholds.
1. High-Performance Cooling & Heating Capability
- Broad temperature range
- Plate heat exchanger combined with tubular heater enables rapid thermal transfer
- Proprietary rapid cooling technology for ultra-high temperatures (direct cooling from 300℃)
2. Intelligent Precision Control
- Maipt system with PID algorithm and PLC integration achieves ±0.1℃ temperature accuracy
3. Multi-Layer Safety Assurance
- Interlocking multi-sensor system ensures safety during prolonged operation
4. Advanced Structural Design
- Fully sealed circulation system extends thermal fluid lifespan
- Magnetic drive pump eliminates leakage risks
5. User-Friendly Operation
- Intuitive touchscreen interface with graphical controls
- Sealed structure minimizes fluid replacement requirements
| Modle | （For specific requirements, please consult our technical team.） | ||
| Temp Range | -80℃~80℃ | ||
| Temp Accuracy | ±0.1℃ at -80℃~-50℃ | ||
| Flowrate Control | （For specific requirements, please consult our technical team.） | ||
| The flow control is regulated by a frequency converter, the maximum pressure of the circulation pump is 5 bar. | |||
| Internal Circulating Fluid Volume | （For specific requirements, please consult our technical team.） | ||
| Expansion Vessel Volume | |||
| System Pressure Display | Refrigeration system pressure and circulating system pressure are detected and displayed on | ||
| the touch screen by the pressure sensor. | |||
| Controller | PLC Controller, fuzzy PID control algorithm with cascade control algorithm | ||
| Thermal Conductive medium oulet temp control mode | |||
| Temp Control | External Temp Sensor: (PT100 or 4～20mA or communication given) Control mode (serial control) | ||
| Communication Protocol | Ethernet interface TCP/IP protocol；RS485 interface modbus RTU protocol | ||
| Confined Circulation System | Equipment heat-conducting medium outlet temperature, medium inlet temperature, refrigeration system condensing temperature, ambient temperature, compressor suction temperature,cooling water temperature (water-cooled equipment) | ||
| Internal Temp Feedback of the Equipment | The whole system is fully closed system, low-temperature does not absorb water in the air, does not evaporate heat-conducting medium, low- temperature automatic replenishment of heat-conducting medium into the circulation system. | ||
| Compressor | Emerson Copeland/Danfoss Scroll Flex Compressors | ||
| Circulator | Magnetic Circulation Pumps | ||
| Evaporator | Plate Heat Exchanger | ||
| Condensor | Copper tube and aluminum fin condenser (air-cooled) | ||
| Plate heat exchanger (water-cooled), special note: clean plant water is required. | |||
| Refrigeration Attachment Plate | Danfoss/Emerson accessories (filter drier, oil separator) | ||
| Operation Panel | Customized 7-inch color touch screen with temperature profile displaydata export | ||
| Safety Protection | With self-diagnostic function; phase sequence phase break protector, freezer overload protection; high-pressure switch, overload relay, thermal protection device and many other safety and security functions. | ||
| Shell Material | Cold rolled sheet spraying (standard color 7035) | ||
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